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Nanoimprint litho makes its mark at SPIE

Posted: 18 Apr 2005  Print Version  Bookmark and Share Subscribe 

Keywords:nanoimprint  lithography  optical  spie  photomask 

[Summary of tips] BROKEN_TABLE_ HIDDEN_END -->The fledgling nanoimprint lithography industry took evolutionary steps recently to make the case that the technology is disruptive to conventional, optical approaches.At the SPIE Microlithography conference in California, vendors rolled out tools that are said to have higher throughput, better align......
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