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CD-SEM offers measurement throughput as high as 1,000 sites/hour

Posted: 10 Dec 2004  Print Version  Bookmark and Share Subscribe

Keywords: soluris  cd-sem  critical dimension scanning electron microscope  semiconductor manufacturing  yosemite 

[Summary of tips] BROKEN_TABLE_ HIDDEN_END --> BROKEN_PICTURE_ HIDDEN_END -->Soluris, a manufacturer of CD-SEMs (Critical Dimension Scanning Electron Microscopes) for advanced semiconductor manufacturing, announced its new Yosemite SP-1000.Measurement throughput as high as 1,000 sites per hour and clear imaging at the bottom of high aspect rati......
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