Manufacturing/Packaging 
Novellus enhances chemical vapor deposition platform
Keywords: novellus systems chemical vapor deposition cvd speed platform speed next
[Summary of tips] Novellus Systems Inc. disclosed that it has made a significant enhancement to its chemical vapor deposition (CVD) SPEED platform.The new SPEED NExT is the result of a joint development effort between Novellus and a Korean DRAM manufacturer, and is designed to provide the industry with a high-density plasma (HDP) gap fill techno......Please login or register with us to view this article>>
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