Manufacturing/Packaging 
Cymer debuts light source for immersion lithography
Keywords: cymer excimer light source xla 200 argon fluoride light source arf light source
[Summary of tips] Cymer Inc., a supplier of deep ultraviolet light sources, has unveiled an excimer light source designed to support immersion lithography at the 45nm manufacturing process node, the company said.The XLA 200 is the first such source, Cymer claimed, and uses a master oscillator power amplifier design with an argon fluoride (ArF) l......Please login or register with us to view this article>>
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