Manufacturing/Packaging 
KLA-Tencor offering delivers surface planarity process control
Keywords: kla-tencor af-lm 300 atomic force microscopy afm
[Summary of tips] KLA-Tencor Corp. unveiled what it claims as the first true line monitoring solution for trench depth and surface planarity process control based on atomic force microscopy (AFM).According to the company, the AF-LM 300 delivers high reliability, unmatched ease of use, and increased throughput compared to traditional AFMs. It ena......Please login or register with us to view this article>>
|
Not yet registered?
 Register FREE to view unlimited features, tutorials and products, and enable any content alert service! |
Registered already? Login to view complete content.
|
| Related Articles | Editor's Choice |
Article Comments - KLA-Tencor offering delivers surface...
Visitor0213
(To avoid code verification, simply login or register with us. It is fast and free!)
Top Ranked Articles
Christmas Wishlist
All I want for Christmas is any of this year's Best of Innovations Design and Engineering Award honorees! Here's the EE Times pick for Top 10 CE gadgets.
Search EE Times Asia
Peek at Hot Gadgets for 2012
