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SUSS sets up Lithography Systems for XinTec

Posted: 14 May 2004  Print Version  Bookmark and Share Subscribe

Keywords: suss microtec  xintec  200mm 1xffl exposure systems  200mm gamma80 clusters  shellcase 

[Summary of tips] SUSS MicroTec AG has installed multiple lithography systems for XinTec Inc.'s production line in Taiwan. The order includes two 200mm 1XFFL exposure systems (1X full-field lithography) and three 200mm Gamma80 clusters (coat/bake/develop). XinTec will use the systems for production of Shellcase's wafer-level CSP.SUSS' 1XFFL expo......
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