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Manufacturing/Packaging  

Newport semiconductor EFEM features wafer handling robot

Posted: 06 Apr 2004  Print Version  Bookmark and Share Subscribe

Keywords: newport  performix  semiconductor fabrication equipment front-end module  semiconductor efem  automated self teach wafer handling robot 

[Summary of tips] Newport Corp. has disclosed that its Performix semiconductor fabrication equipment front-end module (EFEM) is the industry's first EFEM featuring an Automated Self Teach wafer handling robot.The patented Automated Self Teach technology enables the Performix to be installed and operated without extensive operator training, and m......
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