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Manufacturing/Packaging  

Cymer light source operates at 4kHz PRR

Posted: 02 Mar 2004  Print Version  Bookmark and Share Subscribe

Keywords: els-7010  light source  cymer 

[Summary of tips] Cymer Inc. has launched its ELS-7010 krypton fluoride (KrF) excimer light source that is designed for volume-production lithography applications at the 248nm.The ELS-7010 operates at a 4kHz pulse repetition rate (PRR), enabling it to support the highest scan speeds for maximum productivity and wafer throughput. Improved thermal......
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