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Nanometrics to supply Ebara with CMP metrology
Keywords: nanometrics ebara integrated metrology
[Summary of tips] Nanometrics Inc. and Ebara Corp. have concluded a purchase agreement whereby Nanometrics will supply Ebara with integrated metrology (IM) units for integration into Ebara's CMP products. Ebara will integrate the Nanometrics IM products into their CMP products as one of the standard options on the CMP systems.Moreover, Nanometri......Please login or register with us to view this article>>
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