Manufacturing/Packaging 
KLA-Tencor adds defect detection to Surfscan SP1
Keywords: kla-tencor surfscan sp1 defect detection tool monitor expert mx 4.0
[Summary of tips] KLA-Tencor has added defect detection, analysis and process monitoring capabilities to its Surfscan SP1 series of defect detection tools.A suite of software options called Monitor eXpert (MX 4.0) enables the tools to provide both process monitoring information and benchmark defect detection in a single scan with no additional o......Please login or register with us to view this article>>
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