Manufacturing/Packaging 
KLA-Tencor metrology tool provides in-line monitoring
Keywords: kla-tencor metrix 100 metrology system metrology tool
[Summary of tips] KLA-Tencor has introduced what it claims is the industry's first in-line, non-contact metal films metrology system to provide independent measurements of film composition and thickness on product wafers.With film composition becoming as critical as film thickness in determining the functionality and reliability of advanced ICs,......Please login or register with us to view this article>>
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