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Japan plays catch-up on EUV lithography
Keywords: extreme-ultraviolet lithography euv euva meti nec
[Summary of tips] A consortium of nine Japanese companies working on extreme-ultraviolet (EUV) lithography says it is making steady progress toward a spring 2006 target for fielding an alpha tool that would provide 10W of EUV output power. The effort seeks to bring Japan's effort in line with EUV progress made abroad.The Extreme Ultraviolet Lith......Please login or register with us to view this article>>
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