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Manufacturing/Packaging  

Canon KrF scanning stepper realizes 100nm resolving power

Posted: 14 Aug 2003  Print Version  Bookmark and Share Subscribe

Keywords: fpa-6000es6  canon  krf scanning stepper 

[Summary of tips] The 300mm-compatible lithography tool FPA-6000ES6 from Canon Inc. is a KrF (krypton fluoride) scanning stepper that enables volume production at the 100nm process node.Utilizing a 248nm KrF excimer laser as its illumination source and a low aberration 4:1 reduction projection lens with an NA of 0.86, the FPA-6000ES6 makes possi......
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