Manufacturing/Packaging 
Nova tool suits CD, profile measurements
Keywords: nova measuring instruments novascan cd critical dimensions lam research 2300 exelan etch system
[Summary of tips] Nova Measuring Instruments Ltd rolled its NovaScan CD, an integrated tool for critical dimensions (CD) and profile measurements that is available as a standalone system for in-line measurement, and includes Lam Research Corp.'s 2300 Exelan etch system.Designed for direct control of critical feature dimensions and focus control ......Please login or register with us to view this article>>
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