Manufacturing/Packaging 
Soitec, ASM target strained silicon on SOI
Keywords: soitec asm single-wafer epitaxial reactor tool epsilon 3000 ssoi wafer
[Summary of tips] Soitec and ASM International announced that they are working together on strained SSOI technology, targeting the 65nm node.Soitec said that it has adopted the single-wafer epitaxial reactor tool, the Epsilon 3000, developed by ASM International. Soitec CEO Andre Auberton-Herve said the goal is to create a commercial supply of S......Please login or register with us to view this article>>
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