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Cymer breaks ground in new Korea facility

Posted: 10 Mar 2003  Print Version  Bookmark and Share Subscribe

Keywords: cymer  excimer light source  semiconductor manufacturing  advanced deep-ultraviolet light source  lithography 

[Summary of tips] Cymer Inc., a supplier of excimer light sources used in semiconductor manufacturing, has officially opened its new chamber refurbishment facility in South Korea's Eoyeon-Hansan Industrial Park. The 25,000-square-foot facility will serve as Cymer's first international chamber refurbishment hub for the company's entire line of ad......
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