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Startup taps digital holography for wafer inspection
Keywords: analog holography wafer inspection contacts trench capacitors semiconductor wafers
[Summary of tips] A metrology startup is pitching the use of digital holography to peer into the narrow and deep spaces, such as contacts and trench capacitors, on semiconductor wafers. Alpha versions of nLine Corp.'s Fathom inspection system were installed at International Sematech early this year and at Advanced Micro Devices Inc.'s (AMD) Aust......Please login or register with us to view this article>>
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