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Low open area (2 percent) oxide-etch endpoint using the CETAC EP-2000

Posted: 11 Oct 2001  Print Version  Bookmark and Share Subscribe

Keywords: cetac  ep 2000  etch  plasma etch  oxide etch 

[Summary of tips] This application note discusses the use of the CETAC EP-2000 Endpoint and Plasma Diagnostic System to solve the sensitivity issues for low open area plasma etch endpoint applications.View the PDF document for more information.
 

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