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Characterizing electromagnetic MEMS optical switch actuators using the Agilent E4980A precision LCR meter 2007-05-31
This application brief describes how the Agilent E4980A improves the test efficiency of electromagnetic MEMS optical switch actuators  
Improving test efficiency of MEMS electrostatic actuators using the Agilent E4980A precision LCR meter 2007-05-31
This application brief describes how the Agilent E4980A can greatly improve the test efficiency of MEMS electrostatic actuators  
Improving the test efficiency of MEMS capacitive sensors using the Agilent 4980A precision LCR meter 2007-05-31
This application brief describes the features of the Agilent E4980A precision LCR meter and how it can improve the test efficiency of MEMS capacitive sensors  
Characterizing MEMS magneto-impedance sensors using Agilent 4294A and E4991A impedance analyzers 2007-05-31
This application brief describes the benefits of using Agilent impedance analyzers for device characterization of MEMS magneto-impedance (MI) sensors  
Accurate evaluation of MEMS piezoelectric sensors and actuators using the Agilent 4294A precision impedance analyzer 2007-06-20
This application brief describes the benefits of using the Agilent 4294A for device characterization of MEMS piezoelectric sensors and actuators, along with its wide variety of analysis functions and features and how it improves design efficiency  
Silicon micromachining design and fabrication 2002-05-14
This application note illustrates the features and capability of ICSensors silicon micromachining design and fabrication.  


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