Sample handling robot raises ALD systems' productivity
Picosun Oy has expanded its high volume manufacturing solutions with a patented automatic sample handling system based on industrial robotics. The robot is configured for use with the company's P-series large scale batch ALD reactors, clustering them together then synchronising the sample loading and unloading of individual tools.
The company explained that using a robot for sample handling improves the productivity in processing large amounts of 3D objects, especially in industries requiring high production throughput. The robots are said to also increase the efficiency of batch pre-heating and post-deposition high temperature, which may be impossible to handle manually.
In addition to industrial robotic systems, the sample handling options available for the company's ALD tools include a linear loader, vacuum load lock, central vacuum robot sample handling unit, pneumatic chamber lift, and loading through an inert atmosphere glove box.
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